Grated Waveguide Optical Cavity as a Compact Sensor for Sub-nanometre Cantilever Deflections
نویسنده
چکیده
We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an SiO2 cantilever to be integrated with an optical cavity defined by a grated Si3N4 waveguide.
منابع مشابه
Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements
We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching ...
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